Description:
The growth facility at our chair is based on a MBE-sputtering system equipped with five different growth devices connected by an ultra-high-vacuum transfer chamber enabling in-situ exchange of samples between all chambers. The system contains four machines dedicated to molecular-beam-epitaxy (MBE), a sputtering system and some sample characterization techniques. The chambers are primarily intended for the growth of certain material systems, which mostly led to the naming of the chambers ranging from Bismuth-based topological insulators (TI-MBE), metals and oxides (Metal-MBE), synthetic antiferromagnets and altermagnets (OCTO-MBE), antiferromagnetic and altermagnetic oxides (Oxide-MBE) and non-collinear antiferromagnetic systems (Sputtersystem).
The evaporation and sample treatment techniques range from thermal evaporation in the form of Knudsen cells, electron-beam evaporators, via sputtering sources and an oxygen-plasma source for oxidation during evaporation to Ar-ion-bombardment for cleaning issues. All MBE systems are equipped by a reflection high energy electron diffraction (RHEED) system and in the transfer chamber a low energy electron diffraction (LEED) system is installed. Further, a vacuum transport chamber can be attached to the system allowing for in-situ transfer to different chambers at the faculty or even at other institutions on different sample holders.
List of materials:Chamber Evaporation Materials TI Bi, Sb, Te, Se, Mn, V, Sn, W, Nb, GaP Metal Fe, Co, Ni, Ni80Fe20, Cu, Au, Mn, Ti, Si, V, Nb, Al, Pt, W, MgO, HfO, AlOx OCTO Ta, Pt, W, Ru, Ir, Nb, Ni, Co, Ni80Fe20, (In, Cr, Sb) Oxide Ru, Fe, RuO2, oxygen-plasma-source Sputter Mn, Ru, AlOx, Pt, Mn3Sn, Ni80Fe20, Ta, CoFeB, (Mn3Ga, Mn)
| Chamber | Evaporation Materials |
|---|---|
| TI | Bi, Sb, Te, Se, Mn, V, Sn, W, Nb, GaP |
| Metal | Fe, Co, Ni, Ni80Fe20, Cu, Au, Mn, Ti, Si, V, Nb, Al, Pt, W, MgO, HfO, AlOx |
| OCTO | Ta, Pt, W, Ru, Ir, Nb, Ni, Co, Ni80Fe20, (In, Cr, Sb) |
| Oxide | Ru, Fe, RuO2, oxygen-plasma-source |
| Sputter | Mn, Ru, AlOx, Pt, Mn3Sn, Ni80Fe20, Ta, CoFeB, (Mn3Ga, Mn) |
between parenthesis there are the materials to be yet included.
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